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Sulphur
Hexafluoride (SF6)
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Technical Information |
Latest
Update: Jan. 2007
1. Description:
- Sulfur hexafluoride is a colorless in-noxious and non-flammable gas at
atmospheric temperature. With excellent electric insulating and arc-quenching capacity,
sulfur hexafluoride gas has been widely used in the fields of electric, laser, medical,
meteorological, freezing, fire-fighting, chemical, military, space aviation, nonferrous
metallurgy and physical research etc.
2. Physical properties
Properties |
Index |
Chemical formula |
SF6 |
CAS No. |
2551-62-4 |
Molecular Weight |
146.06 |
Sumlimation Point |
- 63.8 oC |
Melting Point |
- 50.8 oC |
Critical Temperature |
45.64 oC |
Critical Pressure |
37.19 atm |
Gas Density @ 20 oC , 1 atm |
6.139 g/L |
3. Typical technical data
Grade Classificastion |
Qualified |
Technical Grade |
High-purity Grade |
SF6 Content, % |
min. 99.8 |
min. 99.9 |
min. 99.99 |
Air Content, % |
max. 0.05 |
max. 0.03 |
max.0.003 |
CF4 Content, % |
max. 0.05 |
max. 0.03 |
max. 0.003 |
Moisture Content, ppm |
max. 8 |
max. 2 |
max.
1 |
Acid Content, ppm
( in terms of HF) |
max. 0.3 |
max. 0.3 |
max. 0.3 |
Hydrolysable Fluoride
Content, ppm |
max. 1.0 |
max. 0.3 |
max. 0.3 |
Mineral Oil Content, ppm |
max. 10 |
max. 3 |
max. 3 |
Toxicity |
non-
toxic |
4.
Applications
In
semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density
plasma etching without generating carbon by-products. SF6 can be used for
etching metal silicides (specially tungsten etchback), nitrides and oxides versus their
metal substrates.In other industries, Sulfur hexafluoride is a insulating material used as
a dielectric in electrical transformers. SF6 can be used as a inert blanketing
agent.SF6 is a tracer gas for determining ventilation rates and air movements
in buildings.
5. Packing, storage , and transportation
Packing: 10kg or 50kg packed in the qualified gas cylinder or packed according to the demands
Storage and Transportation :Use, store and transport
below 45 oC. Store in cool and well-ventilated areas.
Keep away from fire, heat , sunlight and flammable
substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.
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